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Vapour Flow Control by Bronkhorst

Vapour Flow Control by Bronkhorst

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Bronkhorst's evaporation technology is fast, accurate, highly repeatable and efficient.

CEM technology, which stands for Controlled Evaporation Mixing is a unique and patented technology developed for accurate vapour flow control.The CEM-System (Controlled Evaporation and Mixing) is an innovative Liquid Delivery System (LDS) that can be applied for atmospheric or vacuum processes. The vapour generation system consists of a (thermal or Coriolis) liquid flow controller, an MFC for carrier gas and a temperature-controlled mixing and evaporation device. The system is suitable for mixing liquid flows of 1-1200 g/h resulting in saturated vapour flows of 50 mln/min up to 100 ln/min. This vaporizer system can replace bubblers. New opportunities created with the CEM-system: mixtures can be evaporated and even solids, dissolved in solvents can be vaporized successfully

Vapour Flow Control 
Advantage & Benefits

  • Accurately controlled gas/liquid mixture​

  • Fast response​

  • High reproduceability​

  • Very stable vapour flow​

  • Flexible selection of gas/liquid ratio​

  • Lower working temperature than conventional systems​

  • Optional control by PC/PLC (RS232/fieldbus)

From a variety of Bronkhorst products

VDM-Series: Vapour Delivery Modules 
Vapour Control Applications

Vapour Control Applications

VDM-Series: Vapour Delivery Modules 

Based on the CEM-technology, Bronkhorst designed series of Vapour Delivery Modules. The VDM-Series feature integrated power supply with display (1.8” TFT) and control functions.

  • Local or remote trace heating temperature control (optional)

  • The compact ‘plug and work’ module can generate (saturated) vapour flows within the range of 100 mln/min up to 10 ln/min

  • Hardening, thin film coating or planarization processes

  • Testing/calibration of analyzers with reference gas vapour concentrations

  • Toxic gas effects on protective clothing

  • Analyzers with reference H2O vapour concentrations

Chemical Vapour Deposition (CVD)

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