Vapour Flow Control by Bronkhorst
Bronkhorst's evaporation technology is fast, accurate, highly repeatable and efficient.
CEM technology, which stands for Controlled Evaporation Mixing is a unique and patented technology developed for accurate vapour flow control.The CEM-System (Controlled Evaporation and Mixing) is an innovative Liquid Delivery System (LDS) that can be applied for atmospheric or vacuum processes. The vapour generation system consists of a (thermal or Coriolis) liquid flow controller, an MFC for carrier gas and a temperature-controlled mixing and evaporation device. The system is suitable for mixing liquid flows of 1-1200 g/h resulting in saturated vapour flows of 50 mln/min up to 100 ln/min. This vaporizer system can replace bubblers. New opportunities created with the CEM-system: mixtures can be evaporated and even solids, dissolved in solvents can be vaporized successfully
Vapour Flow Control
Advantage & Benefits
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Accurately controlled gas/liquid mixture
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Fast response
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High reproduceability
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Very stable vapour flow
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Flexible selection of gas/liquid ratio
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Lower working temperature than conventional systems
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Optional control by PC/PLC (RS232/fieldbus)
From a variety of Bronkhorst products
Vapour Control Applications
VDM-Series: Vapour Delivery Modules
Based on the CEM-technology, Bronkhorst designed series of Vapour Delivery Modules. The VDM-Series feature integrated power supply with display (1.8” TFT) and control functions.
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Local or remote trace heating temperature control (optional)
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The compact ‘plug and work’ module can generate (saturated) vapour flows within the range of 100 mln/min up to 10 ln/min
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Hardening, thin film coating or planarization processes
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Testing/calibration of analyzers with reference gas vapour concentrations
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Toxic gas effects on protective clothing
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Analyzers with reference H2O vapour concentrations
Chemical Vapour Deposition (CVD)